Ryota Watanuki

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z05

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[10p-Z05-1~19] 6.4 Thin films and New materials

1:30 PM - 1:45 PM

[10p-Z05-5] Synthesis and structural analysis of high nitrogen containing a-CNx:H thin films using radio frequency plasma CVD of the acetylene-N₂-Ar gas mixture

〇(M1)Ryota Watanuki¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech.)