Shinnosuke Yasuoka

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:00 PM - 4:15 PM Z17

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[8p-Z17-1~12] 6.1 Ferroelectric thin films

1:30 PM - 1:45 PM

△ [8p-Z17-3] Ferroelectric properties of room temperature-deposited (Al_1-xSc_x)N films by the sputtering method.

〇(M2)Shinnosuke Yasuoka¹, Takao Shimizu^1,2, Masato Uehara³, Hiroshi Yamada³, Morito Akiyama³, Hiroshi Funakubo¹ (1.Tokyo Tech., 2.NIMS, 3.AIST)