Hiroki Matsumoto

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:00 AM - 11:30 AM Z02

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[10a-Z02-1~9] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM

△ [10a-Z02-5] Thermal oxidation of AlInN layer with low temperature by mist particle supply

〇(M1)Hiroki Matsumoto¹, Sho Iwayama¹, Norikatsu Koide¹, Mahito Odawara¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Motoaki Iwaya¹, Takahiro Maruyama¹, Isamu Akasaki^1,2 (1.Fac. Sci & Tec., Meijo Univ., 2.Akasaki Research Center, Nagoya Univ.)

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