Tomoya Aota

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:30 AM - 12:00 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10a-Z04-1~9] 13.7 Compound and power electron devices and process technology

11:15 AM - 11:30 AM

△ [10a-Z04-7] Wet etching for isolation of N-polar GaN HEMT structure by electrodeless photo-assisted electrochemical reaction

〇(M2)Tomoya Aota¹, Akihiro Hayasaka¹, Isao Makabe², Seiki Yoshida², Takahiro Gotow¹, Yasuyuki Miyamoto¹ (1.Tokyo tech, 2.Sumitomo Electric)