Takahiro Sawada

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:30 AM - 12:00 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10a-Z04-1~9] 13.7 Compound and power electron devices and process technology

11:30 AM - 11:45 AM

△ [10a-Z04-8] Defect-free Atomic Layer Etching of GaN with Neutral-Beam Etching

〇Takahiro Sawada¹, Daisuke Ohori^1,2,3, Kenta Sugawara⁴, Masaya Okada⁴, Daisuke Satou⁵, Hideyuki Kurihara⁵, Seiji Samukawa^1,2 (1.IFS, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.NCTU, 4.Sumitomo Electric Industries, Ltd, 5.SHOWA DENKO K.K.)

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