Takeru Kumabe

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:30 AM - 12:00 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10a-Z04-1~9] 13.7 Compound and power electron devices and process technology

11:45 AM - 12:00 PM

△ [10a-Z04-9] Study on p-GaN Dry-etching towards Fabrication of GaN-based HBTs

〇Takeru Kumabe¹, Yuto Ando¹, Hirotaka Watanabe², Atsushi Tanaka^2,3, Yoshio Honda², Manato Deki^1,4, Shugo Nitta², Hiroshi Amano^2,3,4,5 (1.Nagoya Univ., 2.IMaSS Nagoya Univ., 3.NIMS, 4.VBL Nagoya Univ., 5.ARC Nagoya Univ.)

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