Masaya Hotta

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-Z10-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

8:45 AM - 9:00 AM

[10a-Z10-1] Deposition of AlN thin film using minimal RF-sputtering machine

〇Masaya Hotta¹, Hiroshi Nishizato¹, Haruki Toonoe², Ikunari Shiba², Takuya Maeda³, Satoshi Fujii³ (1.HORIBA STEC, 2.Yokogawa S. S., 3.N.I.T, Okinawa Coll.)

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