Noriko Miura

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-Z10-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM

[10a-Z10-3] Development of Minimal Ion Implantation Tool (III)

〇Noriko Miura¹, Naoki Hashimoto^1,2, Yoshitaka Kitamura^1,2, Fumito Imura³, Kazushige Sato¹, Kazuhiro Koga¹, Yuuki Ishida^1,3, Toshiyuki Oodaira³, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)

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