Mana Otani

→ Search for Mana Otani in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-Z10-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[10a-Z10-5] Wafer rotation effect on silicon epitaxial growth for minimal CVD reactor

〇Mana Otani¹, Atsuhiro Motomiya¹, Toshinori Takahashi¹, Mitsuko Muroi¹, Hitoshi Habuka¹, Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)

▲