FEI MO

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

11:30 AM - 11:45 AM

▼ [10a-Z24-11] Reliability characteristics of Ferroelectric-HfO2 capacitor with IGZO capping for 3D structure non-volatile memory application

〇FEI MO¹, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi^1,2 (1.IIS, Univ. of Tokyo, 2.D.lab,Univ. of Tokyo)