Masaki Hayashi

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

9:30 AM - 9:45 AM

△ [10a-Z24-4] Fabrication of MFSFET with ferroelectric non-doped HfO₂ utilizing Hf interfacial layer

〇Masaki Hayashi¹, Masakazu Kataoka¹, Min Gee Kim¹, Shun-ichiro Ohmi¹ (1.Tokyo Tech)