Yuga Sato

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z05

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[10p-Z05-1~19] 6.4 Thin films and New materials

1:15 PM - 1:30 PM

[10p-Z05-4] Fabrication and structural analysis of a-CNx:H thin films with high nitrogen content by microwave plasma CVD of the acetylene-nitrogen gas mixture

〇(M1)Yuga Sato¹, Haruhiko Ito¹ (1.Nagaoka Univ.)