Kenta Arima

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 6:00 PM Z09

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-Z09-1~20] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:30 PM - 2:45 PM

[10p-Z09-8] Development of System to Measure Electrical Characteristics of MOS Structures Equipped with a Reaction Chamber with Water Vapor

〇Kenta Arima¹, Yohei Wada¹, Ryo Mikurino¹, Makoto Ochi¹, Kentaro Kawai¹, Kazuya Yamamura¹ (1.Osaka Univ.)