Akira Toriumi

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

12:30 PM - 1:00 PM

[10p-Z10-1] [The 42nd Best Review Paper Award Speech] Ge research activities after publishing the awarded JJAP paper

〇Akira Toriumi¹, Tomonori Nishimura² (1.Univ. Tokyo (retired), 2.Univ. Tokyo)