Takashi Ichikawa

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:30 PM - 4:45 PM

△ [10p-Z10-14] A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

〇(M2)Takashi Ichikawa¹, Ken Atsumi¹, Tatsuya Koga¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

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