Ya Zhang

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:15 PM - 5:30 PM

[10p-Z10-17] 1:1 mode coupling strength in GaAs MEMS resonators investigated by thermal effect

〇Ya Zhang¹, Yuri Yoshioka¹ (1.TUAT)