Kenta Kiya

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:00 PM - 1:15 PM

[10p-Z10-2] Relationship between resistivity of barrier layer and TCR in bolometer device with Ge/Si potential barrier structure

〇(M2)Kenta Kiya¹, Akio Furukawa¹ (1.Tokyo University of Science)