Toshifumi Imajo

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:15 PM - 1:30 PM

△ [10p-Z10-3] Solid-phase crystallization of GeSn thin films on insulating films for improving TFT performance

〇Toshifumi Imajo^1,4, Kenta Moto^3,4, Keisuke Yamamoto², Takashi Suemasu¹, Hiroshi Nakashima³, Kaoru Toko^1,4 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ., 4.JSPS Research Fellow)

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