Rei Kuriki

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:15 PM - 2:30 PM

△ [10p-Z10-6] Fabrication of Si Microwires on Si(110) Surface by Anodization

〇(M1C)Rei Kuriki¹, He Wang¹, Tomohiro Mihira², Toshiaki Suzuki¹, Takayuki Yoshino¹, Masaaki Niwa¹, Mitsuya Motohashi¹ (1.Tokyo Denki Univ, 2.JEOL)