Kazuo Tsutsui

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[10p-Z10-8] Control of As clusters in Si by co-doping of As and B

〇Kazuo Tsutsui¹, Taihei Matsuhashi¹, Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Tsutomu Nagayama², Takahiro Higuchi², Shinichi Kato³, Hideaki Tanimura³, Takayuki Muro⁴, Tomohiro Matsushita⁵, Yoshitada Morikawa⁶ (1.Tokyo Tech, 2.Nissin Ion Equipment, 3.SCREEN, 4.JASRI, 5.NAIST, 6.Osaka Univ.)

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