Longxiang Men

→ Search for Longxiang Men in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:00 PM - 3:15 PM

[10p-Z10-9] Influence of H₂ Annealing Process for Si-IGBT

〇(M1)Longxiang Men¹, Ryo Yokogawa^1,2, Yoichiro Numasawa^1,2, Kazuo Tsutsui³, Kuniyuki Kakushima³, Atsushi Ogura^1,2 (1.Meiji University, 2.MREL, 3.Tokyo Tech. Inst.)