Masaki Saito

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:30 PM - 5:45 PM Z15

Symposium (Oral)
| Symposium
| Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

[10p-Z15-1~10] Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

5:30 PM - 5:45 PM

▲ [10p-Z15-10] Evaluation method of vibration spectra of nanomechanical resonators using Helium Ion Microscope

〇Masaki Saito¹, Shinichi Ogawa^2,3, Yukinori Morita^2,3, Shin'ichi Warisawa^1,3, Reo Kometani^1,3 (1.Univ. of Tokyo, 2.AIST, 3.Operando-OIL)