Hanfang Hao

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:30 PM - 5:45 PM Z15

Symposium (Oral)
| Symposium
| Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

[10p-Z15-1~10] Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

3:00 PM - 3:30 PM

▲ [10p-Z15-5] Application of Neon Ion Beam for Processing III-V Semiconductors and Atom Probe Sample Preparation of Ga Sensitive Materials

Deying Xia², 〇Hanfang Hao¹, Vignesh Viswanathan¹, John Notte² (1.Carl Zeiss Pte Ltd, 2.Carl Zeiss SMT Inc.)