Masayuki Nakamura

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:15 PM - 6:00 PM Z23

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[10p-Z23-1~16] 15.6 Group IV Compound Semiconductors (SiC)

1:45 PM - 2:00 PM

[10p-Z23-3] Deposition of SiC thin films using cyclic silane

〇Masayuki Nakamura¹, Takayuki Kobayashi¹, Toshiaki Tatsuta¹, Shin-ichi Motoyama¹ (1.Samco Inc.)