Shunta Murai

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 9:30 AM - 12:00 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11a-Z04-1~9] 13.7 Compound and power electron devices and process technology

11:30 AM - 11:45 AM

[11a-Z04-8] Encapsulant Dependent Effect of Low-Temperature Annealing on Mg-Ion-Implanted GaN

〇Shunta Murai¹, Encheng Wu¹, Masamichi Akazawa¹, Tetsu Kachi² (1.RCIQE, Hokkaido Univ., 2.IMaSS, Nagoya Univ.)