Minju Ahn

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 8:30 AM - 11:45 AM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11a-Z09-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

8:45 AM - 9:00 AM

▲ [11a-Z09-2] Improvement of electrical characteristics of junctionless transistor with BF₂⁺ implanted poly-Si channel by boron segregation and fluorine passivation

〇(D)Minju Ahn¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.Institute of Industrial Science, The University of Tokyo)

9:00 AM - 9:15 AM

▲ [11a-Z09-3] GAA p-type poly-Si junctionless nanowire transistor with ideal subthreshold slope

〇(D)Minju Ahn¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.Institute of Industrial Science, The University of Tokyo)