Weiqi Zhou

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 8:30 AM - 11:15 AM Z10

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-Z10-1~10] 13.3 Insulator technology

9:30 AM - 9:45 AM

▲ [11a-Z10-5] Study on Deposition Mechanism of SiOx Films Produced by Silicone Oil and Ozone Gas

〇(M2)Weiqi Zhou¹, Susumu Horita¹ (1.JAIST)