Hiroyuki Kageshima

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 8:30 AM - 11:15 AM Z10

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-Z10-1~10] 13.3 Insulator technology

9:45 AM - 10:00 AM

[11a-Z10-6] Theoretical study on V_O diffusion in strained Si oxide

Kohei Yata¹, 〇Hiroyuki Kageshima¹ (1.Shimane Univ.)