GE BEIBEI

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 8:30 AM - 11:15 AM Z10

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-Z10-1~10] 13.3 Insulator technology

10:30 AM - 10:45 AM

▼ [11a-Z10-8] Low Temperature Neutral Beam Enhanced Atomic Layer Deposition of Silicon Dioxide and Silicon Nitride

〇(M1)GE BEIBEI¹, Chen Hua-Hsuan³, Daisuke Ohori^1,2,3, Takuya Ozaki¹, Seiji Samukawa^1,2 (1.IFS, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.NCTU)