11:00 AM - 11:15 AM
〇Takahiko Ikarashi1, Takumi Yoshino1, Kazuki Miyata1,2, Keisuke Miyazawa1,2, Megumi Uno3, Chikako Takatoh3, Takeshi Fukuma1,2 (1.Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA corp.)
Fri. Sep 11, 2020 9:00 AM - 11:45 AM Z25
11:00 AM - 11:15 AM
〇Takahiko Ikarashi1, Takumi Yoshino1, Kazuki Miyata1,2, Keisuke Miyazawa1,2, Megumi Uno3, Chikako Takatoh3, Takeshi Fukuma1,2 (1.Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA corp.)