Nobuyuki Kuboi

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:30 PM - 1:30 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics Award Speech

[11p-Z03-1~2] 8.8 Plasma Electronics Award Speech

12:30 PM - 1:00 PM

[11p-Z03-1] [Plasma Electronics Award Speech] Insights into etching properties of atomic layer etching process for dielectric films

〇Nobuyuki Kuboi¹ (1.Sony semiconductor solutions corporation)