Akiko Hirata

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:15 PM - 2:30 PM

△ [11p-Z03-6] Analysis of Hydrogen-induced Damage in SiN Atomic Layer Etching

〇Akiko Hirata^1,2, Masanaga Fukasawa¹, Katsuhisa Kugimiya¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹, Tercero Jomar², Michiro Isobe², Tomoko Ito², Kazuhiro Karahashi², Satoshi Hamaguchi² (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)

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