Hojun Kang

→ Search for Hojun Kang in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM

▼ [11p-Z03-7] Surface fluorination of Y₂O₃ irradiated by low energy CF₃⁺ ion and F⁺ ion

〇(M2)Hojun Kang¹, Tomoko Ito¹, Junghwan Um², Hikaru Kokura², Taekyun Kang², Sungil Cho², Hyunjung Park², Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ., 2.Samsung Electronics)