Yoshinori Kodama

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:00 PM - 3:15 PM

△ [11p-Z03-8] Fluorine injection into III-V semiconductor compounds by diffusion and knock-on

〇Yoshinori Kodama¹, Yoshifumi Zaizen¹, Masanaga Fukasawa¹, Katsuhisa Kugimiya¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹ (1.Sony Semiconductor Solutions Corp.)

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