Kazuyuki Ito

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:00 PM - 4:45 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11p-Z04-1~14] 13.7 Compound and power electron devices and process technology

3:00 PM - 3:15 PM

△ [11p-Z04-8] Wafer Warpage Prediction of Si Trench MOSFET using Multi-Scale Stress Analysis

〇Kazuyuki Ito¹, Tatsuhiro Oda¹, Takuo Kikuchi¹, Yoshiyuki Kitahara¹, Hidehiko Yabuhara¹, Toshifumi Nishiguchi², Hiroaki Katou², Saya Shimomura², Tatsuya Nishiwaki² (1.Toshiba, 2.Toshiba Electronic Devices & Storage)

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