Tomoya Sawafuji

→ Search for Tomoya Sawafuji in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:45 PM - 5:15 PM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11p-Z09-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:15 PM - 4:30 PM

[11p-Z09-12] Measurement of neutral electroless copper plating rate with QCM method

〇(M1)Tomoya Sawafuji¹, Osamu Sugiura¹ (1.Chiba Inst. of Tech.)