Taro Matsudaira

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:45 PM - 5:15 PM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11p-Z09-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:30 PM - 4:45 PM

[11p-Z09-13] Study of Cu Diffusion Barrier using Mn-doped Co film

〇(M2)Taro Matsudaira¹, Tomohiro Shimizu¹, Takeshi Ito¹, Shoso Shingubara¹ (1.Kansai Univ.)