Yukinori Ono

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:45 PM - 5:15 PM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11p-Z09-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

1:30 PM - 2:00 PM

[11p-Z09-3] [The 11th Silicon Technology Division Award Speech] Electron Aspirator using Electron-Electron Scattering in Nanoscale Silicon

〇Yukinori Ono^1,2, Himma Firdaus², Tokinobu Watanabe¹, Masahiro Hori^1,2, Daniel Moraru^1,2, Yasuo Takahashi³, Akira Fujiwara⁴ (1.RIE Shizuoka Univ., 2.GSST Shizuoka Univ., 3.Hokkaido Univ., 4.NTT BRL)

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