Kimihiko Kato

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:45 PM - 5:15 PM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11p-Z09-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

2:15 PM - 2:30 PM

[11p-Z09-5] [The 11th Silicon Technology Division Award Speech] Bilayer tunnel field effect transistor with oxide-/group-IV semiconductors

〇Kimihiko Kato^1,2, Hiroaki Matsui¹, Hitoshi Tabata¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo, 2.AIST)