Hirotaka Iino

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:30 PM - 2:45 PM Z10

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11p-Z10-1~8] 13.3 Insulator technology

1:15 PM - 1:30 PM

[11p-Z10-4] Study of improvement of GeO₂/Ge interface state and GeO₂ film quality by Zr-PMA

〇Hirotaka Iino¹, Tomo Ueno¹, Yoshitaka Iwasaki¹, Haruka Horiguchi¹ (1.Noukou univ.)