TsungEn Lee

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:30 PM - 2:45 PM Z10

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11p-Z10-1~8] 13.3 Insulator technology

2:00 PM - 2:15 PM

▼ [11p-Z10-6] Impact of ALD high-k materials on SiGe MOS interface properties with TiN gate

〇(D)TsungEn Lee¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.The Univ. of Tokyo)