Akira Heya

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 9:00 AM - 12:00 PM Z05

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8a-Z05-1~11] 6.2 Carbon-based thin films

9:45 AM - 10:00 AM

[8a-Z05-4] Etching rate of two-types of DLC films using atomic hydrogen

〇Akira Heya¹, Masahito Niibe², Tetsuo Harada², Hiroki Akasaka³, Kazuhiro Kanda², Takeo Watanabe², Koji Sumitomo¹ (1.Univ. of Hyogo, 2.LASTI Univ. of Hyogo, 3.Tokyo Tech)

Wed. Sep 9, 2020 8:30 AM - 12:30 PM Z29

Oral presentation
| 17 Nanocarbon Technology
| 17.2 Graphene

[9a-Z29-1~14] 17.2 Graphene

8:30 AM - 8:45 AM

[9a-Z29-1] Study on polymerization reaction of pentacene precursors during soft X-ray irradiation using D₂ gas

〇Akira Heya¹, Ryo Yamasaki², Kazuhiro Kanda³, Koji Sumitomo¹ (1.Univ. of Hyogo, 2.Tocalo Co., Ltd., 3.LASTI Univ. of Hyogo)

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