Yoshinori Karo

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 9:00 AM - 12:00 PM Z05

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8a-Z05-1~11] 6.2 Carbon-based thin films

11:00 AM - 11:15 AM

[8a-Z05-8] Fabrication and structural analysis of high-nitrogen containing a-CN_x:H thin films using radio-frequency plasma CVD of the C₆ organic compound-N₂ gas mixture

〇Yoshinori Karo¹, Haruhiko Ito¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. of Tech.)