Ryota Tsujiguchi

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:00 PM - 4:15 PM Z17

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[8p-Z17-1~12] 6.1 Ferroelectric thin films

1:15 PM - 1:30 PM

[8p-Z17-2] Evaluation of chemical bonding state of AlScN using AR-XPS

〇Ryota Tsujiguchi¹, Syorin Sai², Kuniyuki Kakushima², Hiroshi Nohira³ (1.Integrative Science and EngineeringTokyo City Univ., 2.Tokyo Institute of Technology., 3.Tokyo City Univ.)

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