Koya Yasuda

→ Search for Koya Yasuda in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:30 PM - 3:30 PM Z21

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[8p-Z21-1~7] 8.1 Plasma production and diagnostics

1:30 PM - 1:45 PM

[8p-Z21-1] Development of rotational RF magnetron sputtering system with new magnet arrangement for effective target utilization

〇(M1)Koya Yasuda¹, Yasunori Ohtsu¹ (1.Saga.Univ)