Masaomi Sanekata

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:30 PM - 3:30 PM Z21

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[8p-Z21-1~7] 8.1 Plasma production and diagnostics

1:45 PM - 2:00 PM

[8p-Z21-2] Ionic composition analysis of high-power pulsed magnetron sputtering using a reflectron-type time-of-flight mass spectrometer

Yuki Nakagomi¹, Hiroshi Nishida¹, Nobuo Nishimiya¹, 〇Masaomi Sanekata¹, Hiroaki Yamamoto², Naoyuki Hirata², Masahide Tona², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp., 3.Toyota Phys. & Chem. Res. Inst., 4.Tohoku Univ.)

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