Erina Kawamoto

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 10:30 AM - 11:00 AM Z25

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[9a-Z25-6~7] 7.2 Applications and technologies of electron beams

10:45 AM - 11:00 AM

△ [9a-Z25-7] Measurement of virtual source diameter of a filed emission electron source

〇Erina Kawamoto¹, Soichiro Matsunaga^1,2 (1.Hitachi, Ltd., 2.Hitachi High-Tech)