Sho Amano

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 1:00 PM - 2:30 PM Z25

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-Z25-1~6] 7.3 Micro/Nano patterning and fabrication

1:15 PM - 1:30 PM

[9p-Z25-2] 3nm Soft X-ray Lithography using Laser Plasma Emission

〇Sho Amano¹ (1.Univ. of Hyogo)