Syunpei Kajita

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 1:00 PM - 2:30 PM Z25

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-Z25-1~6] 7.3 Micro/Nano patterning and fabrication

1:30 PM - 1:45 PM

[9p-Z25-3] Influence of glycerol in developer on novolac type positive-tone resist solubility.

〇Syunpei Kajita¹, Yukiko Miyaji¹, Hideo Horibe² (1.Sakamoto Co.,Ltd., 2.Osaka-City Univ.)