Masashi Yamamoto

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 1:00 PM - 2:30 PM Z25

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-Z25-1~6] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM

[9p-Z25-5] Evaluation of Reactivity between Photoresist and Oxygen Radicals Generated in He/O₂ Mixtures

〇Masashi Yamamoto¹, Koki Akita¹, Shiro Nagaoka¹, Keisuke Ohdaira², Hironobu Umemoto^3,4, Hideo Horibe⁴ (1.Kagawa KOSEN, 2.JAIST, 3.Shizuoka Univ., 4.Osaka City Univ.)